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Super File Explorer Crack Download Latest Version for Windows x86/x64 PC with crack/keygen Free from the link below.1. Field of the Invention
The present invention relates to infrared photodetectors for detecting radiation, such as infrared radiation. More particularly, the present invention relates to a microelectronic apparatus including a thin-film infrared detector and a method for fabricating the same.
2. Description of the Related Art
In recent years, microelectronic integrated circuits (ICs) for detecting infrared radiation are being used for security systems, infrared data communication devices, and the like. A detector having an array of a large number of photoelectric conversion elements (pixels) has been commercialized. Recently, rapid advances have been made in the development of a microfabrication technology, e.g., a microelectronic semiconductor process technology. The detection of infrared radiation may involve a single element or may include a great number of elements.
Infrared detectors include, for example, a microbolometer and a bolometer array. Microbolometers and bolometer array use a membrane or thin film to absorb infrared radiation. The temperature of the membrane or thin film can be varied by absorbing or emitting infrared radiation.
The bolometer is provided with a piezoelectric element, an electrostriction element or the like between a membrane or thin film and a substrate. The membrane or thin film is formed of pyroelectric, piezoelectric, electrostriction or the like. The piezoelectric element, electrostriction element or the like is formed by microfabrication processing. With the piezoelectric element, the temperature of the membrane or thin film can be changed by absorbing or emitting infrared radiation. The infrared radiation can be detected by the piezoelectric element or the electrostriction element.
A resistance change that occurs in a bolometer during the absorption or emission of infrared radiation, as